Major Memory IDM

Evolving a Product by Evaluating Over 4,000 Unique Memory Cells

The Challenge

The DRAM market is one of the most competitive in the electronics industry, with rivals vying for every possible manufacturing advantage. As it strives to continuously improve its products, Intermolecular’s customer, a major memory IDM, faced a number of materials challenges. These included development of special state-change materials for next-generation phase-change memory (PCM) technology, and high-k dielectrics that could boost the performance of DRAM cell capacitors currently in production. In addition, the company needed to find alloys to better meet its electrical requirements and to find high-k material with low leakage.

The Project

The work began in a matter of days through a Collaborative Development Program (CDP) at Intermolecular’s facility. Specific workflows were developed to address the development of DRAM and PCM materials. Using Intermolecular’s High-Productivity Combinatorial™ (HPC) technology platform, the company and the customer worked on the following project components:

  • HPC deposition of DRAM materials
  • HPC electrical screening of DRAM MIM capacitors
  • HPC deposition of PCM materials
  • HPC in-situ Rs testing of PCM materials
  • HPC electrical screening of PCM devices

The Tempus™ system’s physical vapor deposition (PVD) capabilities were applied for primary screening to identify new materials systems for manufacturing scale-up. Tempus’ atomic layer deposition (ALD) capability is also being utilized for device integration of DRAM and PCM applications.

Results

In approximately 30 days, Intermolecular explored 96 different process conditions for an advanced DRAM application. The initial proof-of-concept CDPs have hit all milestones for timeliness and insight, and the customer is planning a broad incorporation of the Tempus HPC approach into its R&D program. By utilizing systems operating at Intermolecular’s facility, the memory producer is cutting its fixed R&D costs, gaining access to Intermolecular’s expertise and accelerating its R&D abilities—results that will give it a competitive advantage over its DRAM rivals.