Building on technology licensed from Symyx Technologies, Intermolecular has developed semiconductor and solar-specific High-Productivity Combinatorial (HPC) systems and methods in three functional areas to accelerate the pace and learning of our customers' R&D.

Through miniaturization of experiments (which requires fewer chemical resources) and site-isolated parallel and/or rapid serial processing, HPC technology enables Massively Parallel Processing of multiple experiments on a single substrate. We apply this technology to key enabling applications using:

• Wet processing workflow systems for cleaning, etching, stripping, surface preparations, self-assembly processing and deposition, and
• HPC workflows for thin films and stacks based on Physical Vapor Deposition (PVD) and Atomic Layer Deposition (ALD).

We invest significant resources in state-of-the-art, fully automated metrology and e-test infrastructure for rapid Throughput-Matched Characterization of the physical and electrical performance that matches the throughput of our HPC systems.

Finally, our Automation and Analysis Informatics system serves as a backbone for integrating processing and characterization tools into unified R&D workflows. This saves a significant amount of time by enabling:

• Complex experimental design and automated execution of experiments
• Design and tracking of experimental splits and the associated metrology and e-test data, and
• Use of statistical best-known methods (BKMs) to automatically analyze and interpret data and generate reports.

Customers can leverage these technologies in one of three ways: participation in a Collaborative Development Program (CDP) with Intermolecular's multidisciplinary team; purchase of our Tempus HPC integrated hardware and software platform with its associated licenses; or licensing of intellectual property developed and qualified by Intermolecular.