At the core of our workflows is the Tempus™ S-80, a comprehensive Web-based Informatics system that serves as the backbone for integrating processing, characterization and automated analysis tools into unified R&D workflows.
Comprised of various modules, our Informatics system enables complex experimental design and automatic execution of experiments, as well as tracking of experimental splits and the associated metrology and e-test data.
The Tempus S-80's Collaboration Manager module provides secure communication between multiple sites, serves as a virtual fab and handles content-access privileges, document control, e-mail messaging, approval cycles and document-search capabilities.
Our Informatics Workflow Manager controls the flow of activities while grouping experimental runs into projects. It consists of a Workflow Engine, Split Table and Recipe Manager.
All of these subsystems can be configured independently with the appropriate input and output methods and then integrated together through the process flow. Our Informatics Analysis Suite offers multiple options for manipulating and displaying data, including CDF plots, wafer maps, wafer averaging, position attributes, filtering analysis, electrical distributions and customized analysis and reporting.
